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Laureate
Dr. Richard L. Sandstrom and Dr. William Partlo,
Cymer Inc., USA
Title of Work
„VUV Lasers for Advanced Lithography” |
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| Dr. Richard Sandstrom and Dr. William Partlo |
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| | Moore’s Law on the exponential growth of performance of microelectronics is well known. It says that the density of transistors on wafers doubles approximately every two years. This results in a doubling of memory capacity or calculating power of microchips. However, i is hardly known that this development is only possible with the availability of special lasers. | | The technical requirements for these lasers increase with every milestone in the semiconductor road map. Today they manufacture structures in the nanometer domain.
| A co-founder of the American producer of excimer lasers, Cymer Inc., Dr. Richard Sandstrom and its CTO Dr. William Partlo have made a vital contribution to today’s miniaturization in microelectronics with the development of the second generation of excimer lasers, the so called VUV (vacuum-ultraviolet) lasers. They were the first to make the step from the KrF-lasers with a wavelength of 248 nanometers to ArF-lasers with 193 nm. | |
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| The prizewinners at the laser assembly with a resonator
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| | | Not only a shorter wavelength was required, but most difficult, the increase of power combined with a higher precision of various laser light parameters.
As a profitable market leader, today, Cymer has more than 1,000 employees and reached sales of more than half a billion US-dollars. More than 3,000 Cymer lasers have been installed at “fabs” of chip makers around the world. |
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 | Find out more award ceremonies, laureates and nominees of the last years. | |
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 | Five films portraying the prizewinners of the "Berthold Leibinger Innovations- and Zukunftspreis" were awarded.
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